Unit manager
João Rodrigues
Unit Technician
Carla Miguel
Type of equipment:
Bench SEM Microscope Phenom - Pro X
Scanning electron Microscope with qualitative and quantitative analysis of the sample chemical composition by EDS (Energy dispersive X-ray spectroscopy).
EDS specifications
Range of detected elements: from Boron (Z=5) to Americium (Z=95)
Detector:
- Silicon Drift Detector (SDD)
- Cooled by Peltier effect
Lenses
- Optical - magnification: 20-135x
- Electronic - Magnification: 80-135 000x
Lighting
- Optical - LEDs
- Electronic - CeB6 thermionic source ("Gun"). Voltage: 5, 10 and 15 KV adjustable from 4.8 KV in steps of 1 KV. Resolution=<10nm at 10 KV
Image detectors (electronic)
- BSD (high sensitivity backscattered electrons detector)
- SED (secondary electron detector)
Accessories
- Rotary knob
- Sample holders
- standard [Máximum sample size: 25mm (Ø) x 30mm (height)]
- with charge reduction [ Máximum sample size: 25mm (Ø) x 30mm (height)]
- with temperature control [Máximum sample size: 25mm (Ø) x 5mm (height)]
- Keypad controller
Software
- Windows 7 PRO LCP
- ProSuite image acquisition, processing, and analysis
Infrastructure requirements
- Power Supply
- Pre-Vacuum pump
- Chiller Unit