Unit manager

João Rodrigues

Unit Technician

Carla Miguel

Type of equipment:

Bench SEM Microscope Phenom - Pro X

Scanning electron Microscope with qualitative and quantitative analysis of the sample chemical composition by EDS (Energy dispersive X-ray spectroscopy).

EDS specifications

Range of detected elements: from Boron (Z=5) to Americium (Z=95)

Detector:
  • Silicon Drift Detector (SDD)
  • Cooled by Peltier effect
Lenses
  • Optical - magnification: 20-135x
  • Electronic - Magnification: 80-135 000x
Lighting
  • Optical - LEDs
  • Electronic - CeB6 thermionic source ("Gun"). Voltage: 5, 10 and 15 KV adjustable from 4.8 KV in steps of 1 KV. Resolution=<10nm at 10 KV
Image detectors (electronic)
  • BSD (high sensitivity backscattered electrons detector)
  • SED (secondary electron detector)
Accessories 
  • Rotary knob
  • Sample holders
    • standard [Máximum sample size: 25mm (Ø) x 30mm (height)]
    • with charge reduction [ Máximum sample size: 25mm (Ø) x 30mm (height)]
    • with temperature control [Máximum sample size: 25mm (Ø) x 5mm (height)]
  • Keypad controller
Software
  • Windows 7 PRO LCP
  • ProSuite image acquisition, processing, and analysis
Infrastructure requirements
  • Power Supply
  • Pre-Vacuum pump
  • Chiller Unit